FYSS6337 Nanofabrication (3 cr)
Study level:
Advanced studies
Grading scale:
0-5
Language:
English
Responsible organisation:
Department of Physics
Curriculum periods:
2024-2025, 2025-2026, 2026-2027, 2027-2028
Description
- top-down vs bottom-up
- electron beam & ion beam lithography
- ion beam milling
- nanoimprint lithography
- self-assembly-based methods
- dna origami
- van der Waals heterostructures
- the nanotechnology frontier
Learning outcomes
At the end of this course, students will be able to
create a nanofabrication process from scratch
describe the chemical and physical processes in different nanofabrication techniques
evaluate theoretically the outcome of different fabrication processes.
Description of prerequisites
- FYSA1110 Experimental Methods in Physics or similar
- FYSS6336 Microfabrication
Study materials
Lecture notes, website, articles, etc.
Literature
- Sami Franssila, "Introduction to microfabrication", Wiley, 2004, ISBN: 978-0-470-85105-0
- Brodie, Ivor, Muray, Julius J. "The Physics of Micro/Nano-Fabrication" Plenum 1993. ISBN: 978-0-306-44146-2
- Marc J. Madou, "Fundamentals of Microfabrication: The Science of Miniaturization", CRC press, 2002. ISBN: 9780849308260
Completion methods
Method 1
Evaluation criteria:
Active participation is expected. Half of total points required for passing. The grade is based on examination (70 %), assignments (15 %) and laboratory work (15 %).
Time of teaching:
Period 2
Select all marked parts
Parts of the completion methods
x
Participation in teaching (3 cr)
Type:
Participation in teaching
Grading scale:
0-5
Language:
English