FYSS6335 Micro- and Nanofabrication (7 cr)

Open the course unit brochure on Sisu
Study level:
Advanced studies
Grading scale:
0-5
Language:
English
Responsible organisation:
Department of Physics
Curriculum periods:
2020-2021, 2021-2022, 2022-2023, 2023-2024

Description

  • Development of the silicon planar process and lithography

  • thin films: Materials, general properties and characterization

  • deposition methods (Physical & chemical vapor deposition)

  • etching methods (Dry, wet, plasma)

  • doping methods (Diffusion & Ion implantation)

  • nanoimprint lithography and self-assembly -based methods

  • state-of-the-art in microfabrication

  • the nanotechnology frontier 

Learning outcomes

At the end of this course, students will be able to

  • create a micro- or nanofabrication process from scratch

  • describe the chemical and physical processes in different micro- and nanofabrication techniques

  • evaluate theoretically the outcome of different fabrication processes. 

Description of prerequisites

FYSA1110 Experimental Methods in Physics or similar. 

Study materials

Lecture notes, website, articles, etc.

Literature

  • Sami Franssila, "Introduction to microfabrication", Wiley, 2004, ISBN: 978-0-470-85105-0
  • Brodie, Ivor, Muray, Julius J. "The Physics of Micro/Nano-Fabrication" Plenum 1993. ISBN: 978-0-306-44146-2
  • Marc J. Madou, "Fundamentals of Microfabrication: The Science of Miniaturization", CRC press, 2002. ISBN: 9780849308260

Completion methods

Method 1

Description:
Given every two years starting spring 2022.
Evaluation criteria:
Active participation is expected. Half of total points required for passing. The grade is based on examination (70 %), assignments (15 %) and laboratory work (15 %).
Time of teaching:
Period 4
Select all marked parts
Parts of the completion methods
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Teaching (7 cr)

Type:
Participation in teaching
Grading scale:
0-5
Evaluation criteria:
Active participation is expected. Half of total points required for passing. The grade is based on examination (70 %), assignments (15 %) and laboratory work (15 %).
Language:
English
Study methods:
Lectures, assignments, laboratory work, examination. 

Teaching