FYSS6335 Mikro- ja nanovalmistusmenetelmät (7 op)
Opinnon taso:
Syventävät opinnot
Arviointiasteikko:
0-5
Suorituskieli:
englanti
Vastuuorganisaatio:
Fysiikan laitos
Opetussuunnitelmakaudet:
2017-2018, 2018-2019, 2019-2020
Kuvaus
Sisältö
Development of the silicon planar process and lithography; thin films: Materials, general properties and characterization; deposition methods (Physical & chemical vapor deposition); etching methods (Dry, wet, plasma); doping methods (Diffusion & Ion implantation); nanoimprint lithography and self-assembly -based methods; state-of-the-art in microfabrication; the nanotechnology frontier
Suoritustavat
Examination, assignments, laboratory work
Arviointiperusteet
Active participation to the course events is expected. The final grade is based on examination (70 %), assignments (15 %) and laboratory work (15 %). To pass the course students need to have a final score of 50 %.
Osaamistavoitteet
At the end of this course, students will be able to create a micro- or nanofabrication process from scratch and evaluate theoretically the outcome of different fabrication processes.
Lisätietoja
Given on spring semester 2nd period, every two years starting spring 2018.
Esitietojen kuvaus
Before enrolling for this course, students are expected to have studied the Experimental Methods in Physics (FYSA1110).
Oppimateriaalit
Lecture notes, website(s), articles, etc.
Kirjallisuus
- Sami Franssila, "Introduction to microfabrication", Wiley, 2004, ISBN: 978-0-470-85105-0; ISBN: 978-0-470-85105-0
- Brodie, Ivor, Muray, Julius J. "The Physics of Micro/Nano-Fabrication" Plenum 1993. ISBN: 978-0-306-44146-2; ISBN: 978-0-306-44146-2
- Marc J. Madou, "Fundamentals of Microfabrication: The Science of Miniaturization", CRC press, 2002. ISBN: 9780849308260; ISBN: 9780849308260
Suoritustavat
Tapa 1
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